Paddle Cell

The configuration of the paddle cell tool is a benchtop system that fits into standard fume cabinets.

The main feature of the system is the paddle unit, which moves in a short distance parallel to the substrate surface to create specific and uniform flow conditions.

The Paddle Cell Plating lab tool operates in a rack-like configuration with substrates aligned vertically. The wafers are processed on one side with a special wafer holder.

Basic scope

  • Paddle Cell, tank volume 15-25l, anode, wafer holder

Accessories

  • Temperature control
  • pH-control

Applications

  • Electroplating of NiFe, Cu, Sn or Ag on semiconductor substrates

Advantages

  • very uniform flow conditions
  • modular design

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