Semiautomated Multilayer Tool

For the deposition of exothermically reacting nanoscale multilayer systems (RMS), NB Technologies has designed and built this semi-automatic electroplating system as part of the BMBF-funded research project ELISA (FKZ 13XP5047B).

Basic scope:
- two to four process tanks
- one quickdump rinsing tank
- semi-automatic handling with Bernoulli gripper
- filter pumps for the process tanks

Accessories:
- pH control
- temperature control
- level control

Applications
- nanoscale multilayer systems (RMS)
- under bump metallisation
- local chip bonding on wafer level
- temperature-sensitive packaging

Advantages
- one-sided processing
- holderless handling
- precise process control